Ukrainian Journal of Physical Optics

Number 4, Volume 4, 2003

Optimization of Experimental Conditions for Ellipsometric Studies of ultra-thin Absorptive Films
Kostruba A.M.

Lviv Academy of Commerce, 9 Samtshuk Str., 70911, Lviv, Ukraine

The method for optimization of experimental conditions necessary for increasing the sensitivity and accuracy of ellipsometric measurements is presented. The method enables to organ-ize an efficient searching algorithm for the optimum conditions. The substantiation of reliability of the method is accomplished. The correlation of results obtained using the present method and the other independent methods is found. The basic attention is devoted to a choice of refractive index of the immersion medium and the angle of incidence of light, in order to ensure the most exact determination for the parameters of absorptive surface films. The technique for the choice of optimum experimental conditions is analyzed for the particular surface models. The areas of global minimum in the experimental error depend-ences are revealed. The existence of these areas is confirmed with numerical experiments.

Keywords: ellipsometry, absorptive film, surface, inverse ellipsometric problem, optimization, accuracy, sensitivity, errors
PACS: 07.60.Fs, 78.20.-e

doi 10.3116/16091833/4/4/177/2003

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