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Deposition-rate dependence of optical properties of titanium nanolayers
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Haleh Kangarlou and Maryam Motallebi Aghgonbad

Abstract. Titanium nanolayers with the thickness of 133 nm are deposited on glass substrates at 300 K, using the deposition rates 0.1, 1.0, 1.5 and 2.0 A/s. The layers are produced with a physical vapour deposition method under high-vacuum conditions. The optical reflectance and transmittance of the layers thus produced are measured in the wavelength range of 300–1600 nm. The optical functions are calculated basing on the Kramers–Kronig relation. The relation between the optical properties of the titanium nanolayers and their nanostructure dependent on the deposition rates is investigated.

Keywords: Kramers–Kronig relation, effective medium approximation, titanium, thin films, optical properties, deposition rate

PACS: 78.20.Ci, 68.55.-a
UDC: 535.34, 535.312, 539.231, 620.3
Ukr. J. Phys. Opt. 13 4-11 
doi: 10.3116/16091833/13/1/4/2012
Received: 14.06.2011
Final version: 25.10.2011

Анотація.  Титанові наношари з товщиною 133 нм нанесені на скляні підкладки при 300 K, з швидкістю осадження 0,1, 1,0, 1,5 and 2,0 A/с. Шари були осаджені у високому вакуумі методом напилення конденсацією з газової фази. Оптичне відбивання виготовлених шарів досліджене в спектральній області 300–1600 нм. Оптичні функції розраховані на основі співвідношення Крамерса-Кронінга. Досліджено співвідношення оптичних властивостей титанових наношарів і їхньої наноструктури в залежності від швидкості нанесення.
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